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imec to install high NA EUV imaging and attosecond lab to probe lithography

September 6, 2019

San Francisco, California, February 26, 2019 — Today, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, and KMLabs, pioneers and world leaders in ultrafast laser and EUV technology, announce a joint development to create a real-time functional imaging and interference lithography laboratory.

 

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